Application of CPL reticle technology for the 65- and 50-nm node-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Application of CPL reticle technology for the 65- and 50-nm node

Published:2003-06-25 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
Short-container-title:

Author:

Conley Will,Van Den Broeke Douglas J.,Socha Robert J.,Wu Wei,Litt Lloyd C.,Lucas Kevin,Nelson-Thomas Carla M.,Roman Bernard J.,Chen J. Fung,Wampler Kurt E.,Laidig Thomas L.,Hsu Stephen D.,Schaefer Erika,Cassel Shawn,Yu Linda,Kasprowicz Bryan S.,Progler Christopher J.,Petersen John S.,Gerold David J.,Maslow Mark John

Publisher

SPIE

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigation of pupil-fill factors as process window indicators for dry optical lithography;Optics & Laser Technology;2008-02

2. Versatility in lithographic performance of advanced 193 nm contact hole resist;SPIE Proceedings;2006-03-10

3. Key challenges in across-pitch 0.33-k 1 trench patterning using hybrid mask;SPIE Proceedings;2004-05-28

4. Alignment in chromeless masks;Metrology, Inspection, and Process Control for Microlithography XVIII;2004-05-24

5. Contact Hole Resist Solutions for 45-90nm Node Design Rules;Journal of Photopolymer Science and Technology;2004

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP