<title>Design for reliability of MEMS/MOEMS for lightwave telecommunications

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Design for reliability of MEMS/MOEMS for lightwave telecommunications

Published:2001-10-02 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Arney Susanne,Aksyuk Vladimir A.,Bishop David J.,Bolle Cristian A.,Frahm Robert E.,Gasparyan Arman,Giles C. Randy,Goyal Suresh,Pardo Flavio,Shea Herbert R.,Lin Michael T.,White Carolyn D.

Publisher

SPIE

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Reliability aspects of microsensors and micromechatronic actuators for automotive applications;Microelectronics Reliability;2003-07

2. An introduction to mechanical-properties-related issues in MEMS structures;Journal of Materials Science;2003

3. Reliability of MEMS - a methodical approach;Microelectronics Reliability;2002-09

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