1. Measurement of image plane illumination uniformity;Dengkui,2014
2. Design and performance of a refractive optical system that converts a Gaussian to a flattop beam
3. Microlens laser beam homogenizer - from theory to application;Zimmermann,2007
4. High-throughput homogenizers for hyper-NA illumination systems;Ganser,2006
5. Off-line inspection method of microlens array for illumination homogenization in DUV lithography machine;Fang,2013