Optical monitoring of high throughput ion beam sputtering deposition-Reference-Cited by-同舟云学术

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Optical monitoring of high throughput ion beam sputtering deposition

Published:2015-09-23 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Lyngnes Ove,Brauneck Ulf,Wang Jinsong,Erz Ralf,Kohli Sandeep,Rubin Binyamin,Kraus James,Deakins David

Publisher

SPIE

Reference11 articles.

1. Interest of broadband optical monitoring for thin-film filter manufacturing

2. A Symmetrical All-Dielectric Interference Filter*

3. Interferenzlichtfilter;Geffcken,1944

4. Method for Designing Coating Thickness Uniformity Shadow Masks for Deposition Systems with a Planetary Fixture;Lyngnes,2014

5. Turning Value Monitoring of Narrow-band All-dielectric Thin-film Optical Filters

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Comparison of monochromatic and broadband monitoring of optical interference filters;International Conference on Space Optics — ICSO 2022;2023-07-12

2. Strategies for in-situ thin film filter monitoring with a broadband spectrometer;Optics Express;2023-02-27

3. Automated optical monitoring wavelength selection for thin-film filters;Optics Express;2021-09-29

4. Preferential sputtering of metal oxide mixture thin films;Journal of Vacuum Science & Technology A;2021-03

5. A Polarizing Beam Splitting Coating Fabricated with the Use of the Wavelength-Indirect Broadband Optical Monitoring Method;Journal of Applied Spectroscopy;2020-01

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