Technology path-finding for directed self-assembly for via layers-Reference-Cited by-同舟云学术

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Technology path-finding for directed self-assembly for via layers

Published:2017-03-17 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
Short-container-title:

Author:

Badr Yasmine¹,Gupta Puneet¹

Affiliation:

1. Univ. of California, Los Angeles (United States)

Publisher

SPIE

Reference32 articles.

1. Contact holes patterning by directed self-assembly of block copolymers: What would be the bossung plot?;Gharbi,2014

2. Euv patterned templates with grapho-epitaxy dsa at the n5/n7 logic nodes;Gronheid,2016

3. N7 logic via patterning using templated DSA: implementation aspects;Bekaert,2015

4. Directed Self Assembly (DSA) compliant flow with immersion lithography: from material to design and patterning;Ma,2016

5. Directed self-assembly graphoepitaxy template generation with immersion lithography;Ma,2015

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