1. Warlaumont, J. SEMATECH Litho Forum, (2008)
2. Younkin, R.T. SEMATECH Litho Forum, (2008)
3. Mukai, H., Shiobara, E., Takahashi, S., Hashimoto, K Proc. SPIE, 6924, (2008) 692406
4. Kim, H., Kim, M., Lee, S., Kwak, D., Kim, H., Park, C., Lee, D, Choi, S, Kang, C, Han, W 5th International Symposium on Immersion Lithography Extensions, (2008) O-DP-01
5. Tarutani, S., Tsubaki, H., and Kanna, S. Proc. SPIE, 6923, (2008) 69230F