1. Correction for etch proximity: new models and applications
2. Predictable etch model using machine learning;Kim;Optical Microlithography XXXII,2019
3. Dry etch proximity modeling in mask fabrication
4. Resist-slope aware modeling for mask process correction applications;Sharma;Photomask Technology 2019,2019
5. Using curvature-based pre-bias to reduce number of iterations in curvilinear mask process correction;Zuo;Photomask Technology 2021,2021