High dynamic grayscale lithography with an LED-based micro-image stepper-Reference-Cited by-同舟云学术

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High dynamic grayscale lithography with an LED-based micro-image stepper

Published:2016-03-15 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Eckstein Hans-Christoph,Zeitner Uwe D.,Leitel Robert,Stumpf Marko,Schleicher Philipp,Bräuer Andreas,Tünnermann Andreas

Publisher

SPIE

Reference10 articles.

1. Half-tone proximity lithography

2. Realization of refractive microoptics through grayscale lithographic patterning of photosensitive hybrid glass;Rogers,2004

3. Laser-lithography on non-planar surfaces;Radtke,2007

4. Continuous profile writing by electron and optical lithography

5. Cartesian oval representation of freeform optics in illumination systems;Michaelis,2011

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