LCVD-grown micro carbon rod for MEMS applications: a study on the Raman spectroscopic characterization-Reference-Cited by-同舟云学术

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LCVD-grown micro carbon rod for MEMS applications: a study on the Raman spectroscopic characterization

Published:2002-11-01 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
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Author:

Selvan Jayaraman S.,Jeong Sungho

Publisher

SPIE

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Variational analysis of LCVD rod growth;Applied Physics A;2007-04-25

2. Position dependence of growth rate in convection enhanced laser CVD of carbon rods;Applied Physics A;2007-03-28

3. Fabrication and mechanical characterization of LCVD-deposited carbon micro-springs;Sensors and Actuators A: Physical;2006-08

4. Laser-assisted chemical vapor deposition to directly write three-dimensional microstructures;Journal of Laser Applications;2004-08

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