Contribution ratio of process fidelity and beam accuracy in multi-beam mask writing
-
Published:2020-03-23
Issue:
Volume:
Page:
-
ISSN:
-
Container-title:Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
-
language:
-
Short-container-title:
Author:
Ito Rumi,Kojima Yoshinori,Matsumoto Hiroshi