1. Extremely large telescopes;Kirkland,2019
2. The $11-billion Webb telescope aims to probe the early Universe
3. Extreme ultraviolet lithography, https://en.wikipedia.org/wiki/Extreme_ultraviolet_lithography
4. Photonics World, “EUV lithography enablers land German Future Prize”, 26 Nov. 2020. https://optics.org/news/11/11/44
5. High-NA EUV lithography exposure tool: advantages and program progress