<title>Tomographic reconstruction of space plasma inhomogeneities in wide-aperture plasma sources under strong restriction on the points of view

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Tomographic reconstruction of space plasma inhomogeneities in wide-aperture plasma sources under strong restriction on the points of view

Published:2004-05-28 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Rudenko Konstantin V.,Fadeev A. V.,Orlikovsky Alexander A.,Valiev K. A.

Publisher

SPIE

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical emission 2D-tomography of plasma: case of rectangular two-view scanning and diagonal symmetry of inhomogeneities;SPIE Proceedings;2016-12-30

2. Investigation of the BF3 plasma particle’s lateral distribution using two-view emission tomography;Russian Microelectronics;2014-11

3. Verification of the algorithm for emission tomography of plasma inhomogeneities in a plasma-chemical reactor using the Langmuir multiprobe;Russian Microelectronics;2014-07

4. Instrumented wafer as a Langmuir multiprobe tool for lateral plasma homogeneity measurements in processing plasma reactors;SPIE Proceedings;2013-01-03

5. Optimization of the tomographic algorithm of the reconstruction of plasma irregularities in process reactors of microelectronics;Russian Microelectronics;2011-03

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