1. Metrology capabilities and needs for 7nm and 5nm logic nodes;Bunday;Metrology, Inspection, and Process Control for Microlithography XXXI,2017
2. Deep learning
3. Atomic Force Microscope
4. Review of transmission electron microscopy for the characterization of materials;Gauvin;in [Materials Characterization and Optical Probe Techniques: A Critical Review],1997
5. Optical metrology of semiconductor wafers in lithography;den Boef,2013