Observation of fs-laser spallative ablation using soft X-ray laser probe-Reference-Cited by-同舟云学术

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Observation of fs-laser spallative ablation using soft X-ray laser probe

Published:2017-03-14 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
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Author:

Nishikino Masaharu¹,Hasegawa Noboru²,Tomita Takuro²,Minami Yasuo³,Eyama Takashi²,Kakimoto Naoya²,Izutsu Rui²,Baba Motoyoshi³,Kawachi Tetsuya¹,Suemoto Tohru³

Affiliation:

1. National Institutes for Quantum and Radiological Science and Technology (Japan)

2. Tokushima Univ. (Japan)

3. The Univ. of Tokyo (Japan)

Publisher

SPIE

Reference16 articles.

1. Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses

2. Femtosecond laser micromachining in transparent materials

3. Formation of microbumps and nanojets on gold targets by femtosecond laser pulses

4. Surface nanostructuring of metals by laser irradiation: effects of pulse duration, wavelength and gas atmosphere

5. Microstructuring of silicon with femtosecond laser pulses

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