A single-filament schlieren method for flowing characteristic measurements in the pulsed gas lasers

Author:

Xu Yongyue,Zuo Duluo,Wang Xinbing,Li Bin,Yu Anlan,Luo Shiwen

Publisher

SPIE

Reference18 articles.

1. Reduction of Acoustic Waves Induced by Discharge in High Repetition Rate ArF Excimer Laser Cavity to Obtain Narrow-Bandwidth Laser Light

2. 6 kHz MOPA light source for 193 nm immersion lithography;Gillespie,2005

3. Feasibility study of 6 kHz ArF excimer laser for 193 nm immersion lithography;Hori,2005

4. Advances in Patterning Materials for 193 nm Immersion Lithography

5. Basting, D., and Marowsky, G., [Excimer Laser Techology], Springer, Berlin, 89–103 (2005).

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