Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. Measurement of mechanical properties for MEMS materials
2. A simple technique for the determination of mechanical strain in thin films with applications to polysilicon
3. Comparison of stress measurement techniques in surface micromachining
4. J. F. L. Goosen, B. P. van Drieenhuizen, P. J. French, and R. F. Wolfenbuttel , “Stress measurement structures for micromachined sensors,” presented at7th Int. Conf. on Solid-State Sensors and Actuators, Yokohama, Japan, pp. 783–786 (1993).
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献