Laboratory-based EUV spectroscopy for the characterization of thin films, membranes and nanostructured surfaces-Reference-Cited by-同舟云学术

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Laboratory-based EUV spectroscopy for the characterization of thin films, membranes and nanostructured surfaces

Published:2019-09-26 Issue: Volume: Page:
ISSN:
Container-title:International Conference on Extreme Ultraviolet Lithography 2019
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Author:

Bahrenberg Lukas,Glabisch Sven,Ghafoori Moein,Brose Sascha,Danylyuk Serhiy,Stollenwerk Jochen,Loosen Peter

Publisher

SPIE

Reference11 articles.

1. IEEE, “International Roadmap for Devices and Systems,” (2016).

2. Metrology capabilities and needs for 7nm and 5nm logic nodes;Bunday,2017

3. Table-top reflectometer in the extreme ultraviolet for surface sensitive analysis

4. Characterization of pellicle membranes by lab-based spectroscopic reflectance and transmittance measurements in the extreme ultraviolet;Bahrenberg,2017

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Latent image characterization by spectroscopic reflectometry in the extreme ultraviolet;Journal of Micro/Nanopatterning, Materials, and Metrology;2022-04-20

2. High-efficiency diffraction gratings for EUV and soft x-rays using spin-on-carbon underlayers;Nanotechnology;2021-11-15

3. Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup;Optics Express;2020-06-25

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