1. New concepts in OPC;Cobb,2004
2. Improving yield through the application of process window opc;Azpiroz,2009
3. Model-based opc using the meef matrix ii;Lei,2014
4. Resolution Enhancement Techniques in Optical Lithography
5. Mutually optimizing resolution enhancement techniques: illumination, APSM, assist feature OPC, and gray bars;Smith,2001