Electrical performance improvement using nano-oxide thin films deposited via atomic layer deposition on microchannel plates

Author:

Li Qing,Bo Tiezhu,Wang Chen,Lian Jiao,Cai Hua,Shi Xiaoxuan,Liu Hui

Publisher

SPIE

Reference15 articles.

1. Development of a low-cost fast-timing microchannel plate photodetector,” Nucl. Instr. Methods Phys;Xie;Res. A,2016

2. Nano-oxide thin films deposited via atomic layer deposition on microchannel plates;Yan;Nanoscale Res. Lett.,2015

3. An Atomic Layer Deposition Method to Fabricate Economical and Robust Large Area Microchannel Plates for Photodetectors

4. Microchannel plates;Yates,1976

5. Atomic layer deposition of alternative glass microchannel plates;O’Mahony;J. Vac. Sci. Technol. A,2016

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1. Preparation of conductive layer of microchannel plate based on atomic layer deposition technology and its influence on electrical properties;Eighth Symposium on Novel Photoelectronic Detection Technology and Applications;2022-03-27

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