Alignment-tolerant interfacing of a photonic integrated circuit using back side etched silicon microlenses-Reference-Cited by-同舟云学术

Alignment-tolerant interfacing of a photonic integrated circuit using back side etched silicon microlenses

Published:2019-03-04 Issue: Volume: Page:
ISSN:
Container-title:Silicon Photonics XIV
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Author:

Missinne Jeroen,Teigell Benéitez Nuria,Mangal Nivesh,Zhang Jing,Vasiliev Anton,Van Campenhout Joris,Snyder Bradley,Roelkens Gunther,Van Steenberge Geert

Publisher

SPIE

Reference4 articles.

1. An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers

2. Pluggable Single-Mode Fiber-Array-to-PIC Coupling Using Micro-Lenses

3. N. Mangal, J. Missinne, G. Roelkens, J. Van Campenhout, G. Van Steenberge, and B. Snyder, “Expanded-Beam Through-Substrate Coupling Interface for Alignment Tolerant Packaging of Silicon Photonics,” OSA Technical Digest (online). Tu2A.1.

4. Microchemicals, “AZ4562 photoresist microchemicals,” https://www.microchemicals.com/products/photoresists/az_4562.html (19 December 2018).

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