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Thermal oxide patterning method for compensating coating stress in silicon x-ray telescope mirrors

  • Published:2018-07-06 Issue: Volume: Page:
  • ISSN:
  • Container-title:Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray
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Author:

Yao Youwei,Chalifoux Brandon D.,Heilmann Ralf K.,Schattenburg Mark L.,Mori Hideyuki,Chan Kai-Wing,Zhang William

Publisher

SPIE

Reference17 articles.

1. Lynx Mission concept status;Gaskin,2017

2. Toward large-area sub-arcsecond x-ray telescopes II;O’Dell,2016

3. Monocrystalline silicon and the meta-shell approach to building x-ray astronomical optics;Zhang,2017

4. Reflective coating for lightweight x-ray optics;Chan,2012

5. Stress-manipulated coating for figure reshape of light weight X-ray telescope mirrors;Yao,2015

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Progress of coating stress compensation of silicon mirrors for Lynx x-ray telescope mission concept using thermal oxide patterning method;Journal of Astronomical Telescopes, Instruments, and Systems;2019-04-29

2. High-resolution, lightweight, and low-cost x-ray optics for the Lynx observatory;Journal of Astronomical Telescopes, Instruments, and Systems;2019-04-26

3. Thickness distribution of sputtered films on curved substrates for adjustable x-ray optics;Journal of Astronomical Telescopes, Instruments, and Systems;2019-03-23

4. Simulations of film stress effects on mirror segments for the Lynx X-ray Observatory concept;Journal of Astronomical Telescopes, Instruments, and Systems;2019-03-09

5. Compensating film stress in silicon substrates for the Lynx X-ray telescope mission concept using ion implantation;Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray;2018-07-06
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