1. EUV Microexposure Tool (MET) for near-term development using a high NA projection system;Taylor,2000
2. E-D characteristics and aberration sensitivity of the Microexposure Tool (MET);Hudyma,2000
3. High-resolution EUV Microstepper tool for resist testing & technology evaluation;Brunton,2004
4. Status of EUV microexposure capabilities at the ALS using the 0.3-NA MET optic;Naulleau,2004
5. Lithographic performance of high-numerical aperture(NA=0.3) EUV small-field exposure tool (HINA);Oizumi,2005