1. http://spectrum.ieee.org/semiconductors/processors/the-multiple-lives-of-moores-law
2. The economic impact of EUV lithography on critical process modules;Mallik,2014
3. http://www.extremetech.com/computing/221532-tsmc-will-begin-10nm-production-this-year-claims-5nm-by-2020
4. http://arstechnica.com/gadgets/2015/07/ibm-unveils-industrys-first-7nm-chip-moving-beyond-silicon/
5. Self-aligned triple patterning for continuous IC scaling to half-pitch 15nm;Yijian,2011