Development of Sn-fueled high-power DPP EUV source for enabling HVM-Reference-Cited by-同舟云学术

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Development of Sn-fueled high-power DPP EUV source for enabling HVM

Published:2007-03-16 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Teramoto Yusuke,Narihiro Zenzo,Yamatani Daiki,Yokoyama Takuma,Bessho Kazunori,Joshima Yuki,Shirai Takahiro,Mouri Shinsuke,Inoue Takahiro,Mizokoshi Hiroshi,Niimi Gohta,Hosokai Tomonao,Yabuta Hironobu,Paul Kohkan C.,Takemura Tetsu,Yokota Toshio,Kabuki Kiyoyuki,Miyauchi Koji,Hotta Kazuaki,Sato Hiroto

Publisher

SPIE

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. Characteristics of discharge and beyond extreme ultraviolet spectra of laser induced discharge gadolinium plasma;Optics & Laser Technology;2021-06

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