Delineation of MEMS microstructures in silicon using CF 4 /O 2 gas mixtures in reactive ion etching
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Published:2002-11-01
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ISSN:0277-786X
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Container-title:Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
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Author:
Paul Ashok K.,Dimri Ashok K.,Bajpai Ram P.