Development of an illumination module for stroboscopic phase-shift interferometry on MEMS devices-Reference-Cited by-同舟云学术

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Development of an illumination module for stroboscopic phase-shift interferometry on MEMS devices

Published:2019-06-21 Issue: Volume: Page:
ISSN:
Container-title:Optical Measurement Systems for Industrial Inspection XI
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Author:

de Medeiros Ventura Luiz Guilherme,Wolschke Steffen,Skupsch Christoph,Berndt Dirk

Publisher

SPIE

Reference27 articles.

1. Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer;Jeremias,2013

2. Static and dynamic micro deformable mirror characterization by phase-shifting and time-averaged interferometry;Arnaud,2017

3. Stroboscopic phase-shifting interferometry for dynamic characterization of optical MEMS;Matthew,1999

4. Stroboscopic Imaging Interferometer for MEMS Performance Measurement

5. Measuring the profile and out-of-plane motion of microstructures using microscopic interferometry with FTM analysis;Xiaodong,2006

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1. Analog Spatial Light Modulators Based on Micromirror Arrays;Micromachines;2021-04-23

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