FUV reflectometer for in-situ characterization of thin films deposited under UHV
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SPIE
Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Coating development for the far and extreme ultraviolet based on material characterization;SPIE Proceedings;2011-09-22
2. Carbon coatings for extreme-ultraviolet high-order laser harmonics;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2011-04
3. Optical properties of carbon coatings for extreme-ultraviolet high-order laser harmonics;SPIE Proceedings;2010-08-19
4. Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm;Optics Express;2009-11-30
5. In situ reflectance and optical constants of ion-beam-sputtered SiC films in the 584 to 1492 nm region;Applied Optics;2009-08-11
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