Scatterometry of honed surfaces
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision;Bulletin of the Polish Academy of Sciences Technical Sciences;2020-05-08
2. Laser methods based on an analysis of scattered light for automated, in-process inspection of machined surfaces: A review;Optik;2015-10
3. The Diagnostics of Abrasive Tools After Internal Cylindrical Grinding of Hard-to-Cut Materials by Means of a Laser Technique Using Imaging and Analysis of Scattered Light;Arabian Journal for Science and Engineering;2012-10-11
4. Non-Gaussian scattering of light applied to investigation of ruffled surface of liquid;SPIE Proceedings;2003-04-07
5. A parametric study on surface roughness evaluation of semi-conductor wafers by laser scattering;Optik;2003
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