Performance improvement of a large range metrological AFM through parasitic interference feedback artifacts removing by using laser multimode modulation method
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Published:2013-05-29
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ISSN:0277-786X
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Container-title:Scanning Microscopies 2013: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
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Author:
Li Qi,Gao Sitian,Li Wei,Lu Mingzhen,Shi Yushu