Progress in the fabrication of high-aspect-ratio zone plates by soft x-ray lithography-Reference-Cited by-同舟云学术

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Progress in the fabrication of high-aspect-ratio zone plates by soft x-ray lithography

Published:2002-11-01 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Divan Ralu,Mancini Derrick C.,Moldovan Nicolai A.,Lai Barry P.,Assoufid Lahsen,Leonard Quinn J.,Cerrina Franco

Publisher

SPIE

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Numerical analysis of X-ray multilayer Fresnel zone plates with high aspect ratios;Laser and Particle Beams;2024

2. Submicrometer ultrananocrystalline diamond films processed in oxygen and hydrogen plasma and analyzed by UV-vis spectroscopy: Thickness and optical constant results;Surface Science Spectra;2020-08-07

3. Atomic layer deposition frequency-multiplied Fresnel zone plates for hard x-rays focusing;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2018-01

4. Metal-assisted etching of silicon molds for electroforming;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2013-11

5. Nano fabrication of high efficiency stacked crystal zone plate for x-ray optics;SPIE Proceedings;2013-09-26

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