Magnetostrictively deforming the surface of a silicon wafer at two locations-Reference-Cited by-同舟云学术

Magnetostrictively deforming the surface of a silicon wafer at two locations

Published:2018-09-18 Issue: Volume: Page:
ISSN:
Container-title:Adaptive X-Ray Optics V
language:
Short-container-title:

Author:

Ulmer Melville P.,Coppejans Rocco,Keeley Kathryn,Khreishi Manal,Schonfeld Zachary,Reinhardt William,Borgsmiller Leah,Baturalp Turgut,Coverstone Victoria,Shiri Ron,Cao Jian,Buchholz D. B.,Rodriguez Luis,O'Donnell Allison

Publisher

SPIE

Reference8 articles.

1. Vikhlinin, A., Lynx X-ray Observatory (2016).

2. Ulmer, M. P., Wang, X., Cao, J., Graham, M. E., and Vaynman, S., “Update to an application using magnetic smart materials to modify the shape of an x-ray telescope mirror,” in [Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series], Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series 8861 (Sept. 2013).

3. O’Dell, S. L., Allured, R., Ames, A. O., Biskach, M. P., Broadway, D. M., Bruni, R. J., Burrows, D. N., Cao, J., Chalifoux, B. D., Chan, K.-W., Chung, Y.-W., Cotroneo, V., Elsner, R. F., Gaskin, J. A., Gubarev, M. V., Heilmann, R. K., Hertz, E., Jackson, T. N., Kilaru, K., Kolodziejczak, J. J., McClelland, R. S., Ramsey, B. D., Reid, P. B., Riveros, R. E., Roche, J. M., Romaine, S. E., Saha, T. T., Schattenburg, M. L., Schwartz, D. A., Schwartz, E. D., Solly, P. M., Trolier-McKinstry, S., Ulmer, M. P., Vikhlinin, A., Wallace, M. L., Wang, X., Windt, D. L., Yao, Y., Ye, S., Zhang, W. W., and Zuo, H., “Toward large-area sub-arcsecond x-ray telescopes II,” in [Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series], Proc. SPIE 9965, 996507 (Sept. 2016).

4. Wang, X., Yao, Y., Ye, S., Liu, T., Assoufid, L., Cao, J., and Ulmer, M. P., “Shaping Si, NiCo, and glass substrates via stresses in the coatings,” in [Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series], Proc. SPIE 9965, 99650D (Sept. 2016).

5. Chalifoux, B., Sung, E., Heilmann, R. K., and Schattenburg, M. L., “High-precision figure correction of x-ray telescope optics using ion implantation,” in [Optics for EUV, X-Ray, and Gamma-Ray Astronomy VI], Proc. SPIE 8861, 88610T (Sept. 2013).

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Active X-ray Optics for Astronomy;Handbook of X-ray and Gamma-ray Astrophysics;2024

2. Active X-Ray Optics for Astronomy;Handbook of X-ray and Gamma-ray Astrophysics;2023

3. Demonstration of magnetic and light-controlled actuation of a photomagnetically actuated deformable mirror for wavefront control;Optical Engineering;2021-12-01

4. Measuring large amplitude surface figure error using coordinate metrology;Optical Engineering;2021-08-17