Reconstructing phase aberrations for high-precision dimensional microscopy-Reference-Cited by-同舟云学术

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Reconstructing phase aberrations for high-precision dimensional microscopy

Published:2022-05-20 Issue: Volume: Page:
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Container-title:Optics and Photonics for Advanced Dimensional Metrology II
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Author:

Schneider Philipp-Immanuel,Manley Phillip,Krüger Jan,Zschiedrich Lin,Köning Rainer,Bodermann Bernd,Burger Sven

Publisher

SPIE

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Introduction and application of a new approach for model-based optical bidirectional measurements;Measurement Science and Technology;2024-05-21

2. Electromagnetic modeling of interference, confocal, and focus variation microscopy;Advanced Photonics Nexus;2024-02-05

3. Impact study of numerical discretization accuracy on parameter reconstructions and model parameter distributions;Metrologia;2023-07-20

4. 3D full-wave multi-scattering forward solver for coherent microscopes;Optics Express;2023-04-21

5. In situ, back-focal-plane-based determination of the numerical apertures in optical microscopes;Applied Optics;2023-01-17

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