Author:
Someda Yasuhiro,Sohda Yasunari,Satoh Hidetoshi,Saitou Norio
Cited by
5 articles.
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1. Modified knife-edge method for current density distribution measurements in e-beam writers;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2013-05
2. Measurements of Variable-Shaped Electron Beams with Solid-State Detector and Scattering Aperture;Japanese Journal of Applied Physics;2007-09-20
3. Optical properties of a multibeam column with a single-electron source;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2007
4. E-Beam Mask Writers;Handbook of Photomask Manufacturing Technology;2005-04-07
5. Recent progress in cell-projection electron-beam lithography;Microelectronic Engineering;2003-06