Author:
Jang Jong Hoon,Lee ByeongSoo,Kang Young Seog,Chang Chansam,Kong Jeong-Heung,Kim Young Ha,Bouman Wim,de Graaf Roelof,Weichselbaum Stefan,Droste Richard,de Boeij Wim P.,van Bussel Bart,Neefs Patrick,Rijke Arij
Reference3 articles.
1. Pattem Deformation Induced from Intensity- Unbalanced Off-Axis Illumination;Kim,1997
2. Quasi-telecentricity: the effects of unbalanced multipole illumination;Renwick,2007
3. Overlay Error due to Lens Coma and Asymmetric Illumination Dependence on Pattern Feature;Nomura,1998
Cited by
1 articles.
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