Real-time critical dimension measurement of thin film transistor liquid crystal display patterns using optical coherence tomography-Reference-Cited by-同舟云学术

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Real-time critical dimension measurement of thin film transistor liquid crystal display patterns using optical coherence tomography

Published:2014-01-02 Issue:1 Volume:23 Page:013001
ISSN:1017-9909
Container-title:Journal of Electronic Imaging
language:en
Short-container-title:J. Electron. Imaging

Author:

Park Sung-Hoon¹,Kim Tai-Wook²,Lee Jeong-Ho³,Pahk Heui-Jae¹

Affiliation:

1. Seoul National University, School of Mechanical and Aerospace Engineering, Seoul 151-742, Republic of Korea

2. SNU Precision Co., Ltd., #201, 1629-2, Nakseongdae-dong, Kwanak-gu, Seoul 151-818, Republic of Korea

3. Applied Optical Equipment Group, Samsung Electro-Mechanics, 314, Maetan 3-dong, Yeongtong-gu, Suwon-si, Gyeonggi-do 443-743, Republic of Korea

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Computer Science Applications,Atomic and Molecular Physics, and Optics

Reference25 articles.

1. Optimized Overlay Metrology Marks: Theory and Experiment

2. Novel, fast, edge-directed image reconstruction algorithm using a substepping system for critical-dimension measurement of glass panels

3. Mirau correlation microscope

4. Real-time reflectivity and topography imagery of depth-resolved microscopic surfaces

5. Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral interferometric microscope

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nondestructive in situ detection of microbubble defects in the screen by optical coherence tomography;The European Physical Journal Special Topics;2021-12-29

2. Active Contour Method Based Sub-pixel Critical Dimension Measurement of Thin Film Transistor Liquid Crystal Display (TFT-LCD) Patterns;International Journal of Precision Engineering and Manufacturing;2020-01-10

3. Robust defect detection method for a non-periodic TFT-LCD pad area;International Journal of Precision Engineering and Manufacturing;2017-08

4. Critical dimension measurement of transparent film layers by multispectral imaging;Optics Express;2014-07-09

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