Study on high-precision measurement of long radius of curvature-Reference-Cited by-同舟云学术

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Study on high-precision measurement of long radius of curvature

Published:2016-09-27 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
Short-container-title:

Author:

Wu Dongcheng¹,Peng Shijun¹,Gao Songtao¹

Affiliation:

1. Changchun Institute of Optics, Fine Mechanics and Physics (China)

Publisher

SPIE

Reference16 articles.

1. Design of all spherical surfaces zoom lithographic system[J];Bo,2013

2. Optical design of hyper numerical-aperture Schwarzchild projection lithographic lens[J];Dawei,1996

3. Self-calibration for microrefractive lens measurements

4. The research of single frequency laser interference for spherical radius of curvature measurement [D];Li,2005

5. Radius measurement by interferometry

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