1. RELAX: resolution enhancement by laser-spectrum adjusted exposure;Lalovic,2005
2. Contribution of polychromatic illumination to optical proximity effects in the context of deep-UV lithography;Kroyan,2002
3. Fast and accurate laser bandwidth modeling of optical proximity effects;Lalovic,2007
4. Modeling and performance metrics for longitudinal chromatic aberrations, focus-drilling, and Z-noise: exploring excimer laser pulse-spectra;Smith,2007
5. Impact of finite laser bandwidth on the critical dimension of L/S structures