Variable-angle, spectroscopic ellipsometry study on the repeated application of first contact polymer on silicon-based surfaces

Author:

Vawdrey Joshua J.,Hamilton James P.,Allred David D.

Publisher

SPIE

Reference13 articles.

1. “Photonic Cleaning Technologies.” URL: https://www.photoniccleaning.com/. Accessed: July 31st, 2023.

2. Study on contamination control of optical thin films with First Contact;Baozhu,2019

3. Drag wiping with methanol vs First Contact;Phelps,2010

4. Optical contamination control in the Advanced LIGO ultra-high vacuum system;Phelps,2013

5. Determining indices of refraction for ThO2 thin films sputtered under different bias voltages from 1.2 to 6.5 eV by spectroscopic ellipsometry

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