Testing optical surfaces using two-frame phase-shifting interferometry
Author:
Tian Chao,Liu Shengchun
Reference37 articles.
1. Lithographic lens testing: analysis of measured aerial images, interferometric data, and photoresist measurements;Flagello,1996
2. Nikon projection lens update;Matsuyama,2004
3. National Ignition Facility laser performance status
4. Hubble Space Telescope primary-mirror characterization by measurement of the reflective null corrector
5. Surface metrology