Low scattering filter coatings made by plasma-assisted reactive magnetron sputtering
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SPIE
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1. Ultrahigh-reflective optical thin films prepared by reactive magnetron sputtering with RF-induced substrate bias;Review of Scientific Instruments;2024-04-01
2. Development of linear variable filter and black coatings by PARMS technology for FLORIS HR focal plane array of FLEX mission;International Conference on Space Optics — ICSO 2018;2019-07-12
3. Manufacturing of high performance VIS-NIR beam splitters by plasma assisted thin film deposition technologies;Advances in Optical Thin Films VI;2018-06-05
4. Low-loss interference filter arrays made by plasma-assisted reactive magnetron sputtering (PARMS) for high-performance multispectral imaging;SPIE Proceedings;2016-10-19
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