Modeling the topographic lateral resolution of interferometers

Author:

de Groot Peter J.,Kramer James W.,Sutherland Torrie P.

Publisher

SPIE

Reference19 articles.

1. ISO, “25178-600:2019, Geometrical product specifications (GPS) — Surface texture: Areal — Part 600: Metrological characteristics for areal-topography measuring methods,” International Organization for Standardization, Geneva (2019).

2. The Meaning and Measure of Lateral Resolution for Surface Profiling Interferometers;de Groot;Optics and Photonics News,2012

3. Effects Of The Optical Transfer Function In Surface Profile Measurements;Church,1989

4. Measurement of wavefront structure from large-aperture optical components by phase-shifting interferometry;Wolfe,1995

5. The instrument transfer function for optical measurements of surface topography;de Groot;Journal of Physics: Photonics,2021

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