Author:
Abdo Amr Y.,Reu Phillip L.,Schlax Michael P.,Engelstad Roxann L.,Beckman William A.,Mitchell John W.,Lovell Edward G.
Cited by
2 articles.
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1. Bibliography (1994–2004) of other topics;Modelling and Simulation in Materials Science and Engineering;2004-12-08
2. Thermal response of optical reticles: experimental verification of finite element models;Journal of Micro/Nanolithography, MEMS, and MOEMS;2004-04-01