Fabrication and replication of high efficiency blazed gratings with grayscale electron beam lithography and UV nanoimprint lithography-Reference-Cited by-同舟云学术

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Fabrication and replication of high efficiency blazed gratings with grayscale electron beam lithography and UV nanoimprint lithography

Published:2020-02-28 Issue: Volume: Page:
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Container-title:Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII
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Author:

Mattelin Marie-Aline,Radosavljevic Ana,Missinne Jeroen,Cuypers Dieter,Kommeren Sander,Vandael Jos,ter Meulen Jan Matthijs,Verduyckt Luc,Van Steenberge Geert

Publisher

SPIE

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanoimprint lithography for grayscale pattern replication of MEMS mirrors in a 200 mm wafer;Journal of Manufacturing Processes;2024-04

2. Non-destructive multi-parameter investigation of nanoimprinted structures;Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII;2024-03-13

3. Manufacturing of phase gratings using nanoimprint lithography;Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII;2024-03-13

4. Investigation of Inkjet-Printed Masks for Fast and Easy Photolithographic NIL Masters Manufacturing;Micromachines;2023-07-29

5. Research Progress in Design and Fabrication of Convex Grating;LASER OPTOELECTRON P;2021

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