In situbow change of Al-alloy MEMS micromirrors during 248-nm laser irradiation-Reference-Cited by-同舟云学术

In situbow change of Al-alloy MEMS micromirrors during 248-nm laser irradiation

Published:2016-09-21 Issue:3 Volume:15 Page:035502
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Mai Alexander¹,Bunce Christopher¹,Hübner Rene²,Pahner Daniel¹,Dauderstädt Ulrike¹

Affiliation:

1. Fraunhofer Institute for Photonic Microsystems, Maria-Reiche-Street 2, 01109 Dresden, Germany

2. Institute of Ion Beam Physics and Materials Research, Helmholtz–Zentrum Dresden–Rossendorf, P. O. Box 51 01 19, Bautzner Landstraße 400, 01314 Dresden, Germany

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. MEMS reliability from a failure mechanisms perspective

2. Lifetime estimates and unique failure mechanisms of the Digital Micromirror Device (DMD)

3. Optical power induced damage to microelectromechanical mirrors

4. Damage of MEMS thermal actuators heated by laser irradiation

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. On Thermo-Optically Excited Parametric Oscillations of Microbeam Resonators. II;Vestnik St. Petersburg University, Mathematics;2023-12

2. On Opto-Thermally Excited Parametric Oscillations of Microbeam Resonators. I;Vestnik St. Petersburg University, Mathematics;2023-06

3. Nonlinear Modal Interaction between Longitudinal and Bending Vibrations of a Beam Resonator under Periodic Thermal Loading;Vestnik St. Petersburg University, Mathematics;2022-06

4. Nonlinear interaction of longitudinal and transverse vibrations of a rod at an internal combinational resonance in view of opto-thermal excitation of N/MEMS;Journal of Sound and Vibration;2021-09

5. Stability of the Bernoulli–Euler Beam under the Action of a Moving Thermal Source;Doklady Physics;2020-02