Accurate lithography hotspot detection using deep convolutional neural networks-Reference-Cited by-同舟云学术

Accurate lithography hotspot detection using deep convolutional neural networks

Published:2016-11-18 Issue:4 Volume:15 Page:043507
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Shin Moojoon¹,Lee Jee-Hyong²

Affiliation:

1. Sungkyunkwan University, Department of Electrical and Computer Engineering, 2066 Seobu-ro, Jangan-gu, Suwon 16419, Republic of KoreabSamsung Electronics, San #16, Banwol-dong, Hwasung 445-701, Republic of Korea

2. Sungkyunkwan University, Department of Electrical and Computer Engineering, 2066 Seobu-ro, Jangan-gu, Suwon 16419, Republic of Korea

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference26 articles.

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3. Fast Dual-Graph-Based Hotspot Filtering

4. Accurate detection for process-hotspots with vias and incomplete specification

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