In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs-Reference-Cited by-同舟云学术

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In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs

Published:2016-03-29 Issue:1 Volume:15 Page:015501
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Elhady Alaa¹,Mahmoud Mohamed A. E.²,Khalil Diaa²

Affiliation:

1. Ain Shams University, Faculty of Engineering, 1 Elsarayat Street, Abbassia, Cairo 11517, Egypt

2. Ain Shams University, Faculty of Engineering, 1 Elsarayat Street, Abbassia, Cairo 11517, EgyptbSi-Ware Systems, SWS, 3 Khalid Ibn Al-Waleed Street, Heliopolis, Cairo 11361, Egypt

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Perspective of MEMS based raster scanning display and its requirements for success

2. Large aperture MEMS scanner module for 3D distance measurement

3. MEMS-based pico projector display

4. Dual-fiber OCT measurements

5. In vivo endoscopic optical coherence tomography by use of a rotational microelectromechanical system probe

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1. Design and modeling of a novel electromechanical optical micro-scanner;Microsystem Technologies;2020-04-11

2. Optical characterization of high speed microscanners based on static slit profiling method;Optics and Lasers in Engineering;2017-01

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