Machine learning based wafer defect detection-Reference-Cited by-同舟云学术

Machine learning based wafer defect detection

Published:2019-03-20 Issue: Volume: Page:
ISSN:
Container-title:Design-Process-Technology Co-optimization for Manufacturability XIII
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Author:

Ma Yuansheng,Wang Feng,Xie Qian,Hong Le,Mellmann Joerg,Sun Yuyang,Gao Shaowen,Singh Sonal,Venkatachalam Panneerselvam,Word James

Publisher

SPIE

Reference4 articles.

2. Process-Window Sensitive Full-Chip Inspection for Design-to-Silicon Optimisation in the SubWavelength Era;Brodsky;IEEE/SEMI,2005

3. OPC hotspot identification challenges: ORC vs. PWQ on wafer;Andre,2008

4. Combinational Optical Rule Check on Hotspot Detection;Alexander,2018

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