Material design for immersion lithography with high refractive index fluid (HIF)
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SPIE
Cited by 21 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Optical Lithography;Comprehensive Nanoscience and Nanotechnology;2019
2. Microneedles for vaccine delivery: challenges and future perspectives;Therapeutic Delivery;2017-06
3. Talbot effect immersion lithography by self-imaging of very fine grating patterns;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-11
4. Subwavelength resist patterning using interference exposure with a deep ultraviolet grating mask: Bragg angle incidence versus normal incidence;Applied Optics;2012-05-31
5. Optical Lithography . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Patrick Naulleau;Nanofabrication Handbook;2012-02-24
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