Determination of the characteristics of a self-built coherence scanning interferometer with a universal calibration artefact

Author:

Eifler Matthias,Hering Julian,Bulun Georgis,von Freymann Georg,Seewig Jörg

Publisher

SPIE

Reference56 articles.

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5. ISO/DIS 25178-700: Geometrical product specifications (GPS) – Surface texture: Areal– Part 700: Calibration, adjustment and verification of areal topography measuring instruments (2020).

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