Method for detecting surface roughness of silicon carbide substrate based on parallel differential confocal microscope-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Method for detecting surface roughness of silicon carbide substrate based on parallel differential confocal microscope

Published:2022-02-15 Issue: Volume: Page:
ISSN:
Container-title:Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021)
language:
Short-container-title:

Author:

Liu Yile,Yi Dingrong,朱星星,叶一青

Publisher

SPIE

Reference9 articles.

1. Optics and Precision Engineering

2. Advance in the three-di-mensional surface metrology[J];JIANG;Engineering De-sign,2000

3. Evaluation of the Surface Characteristics of Various Implant Abutment Materials Using Confocal Microscopy and White Light Interferometry

4. Surface metrology

5. Development and application of the rough-ness measuring instrument of stylus and three-di-mensional[J];LI;Lubrication Engineering,2006

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP